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SIMS/SNMS
- VG Scientific SIMSLAB IIIB |
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| VG
Scientific
SIMSLAB
IIIB |
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| UHV
analysis chamber of SIMS |
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Examples of SIMS studies at Superlab: |
| depth
profiling of Al, B, As species implanted into various
silicon based matrices |
| Depth
profiling of hard coating materials |
| depth
profiling of AlGaAs/GaAs multiquantum wells |
| 3D
chemical mapping of trace elements |
| Static
SIMS of various polymers and inorganic matrices |
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info
